Investigations of Surface Reactions in Neutral Loop Discharge Plasma for High-Aspect-Ratio SiO_2 Etching
スポンサーリンク
概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2003-03-15
著者
-
Uchida T
Institute For Semiconductor Technologies Ulvac Inc.
-
Uchida Taijiro
Institute Of Plasma Physics Nagoya University
-
Uchida Tsutomu
National Institute Of Advanced Industrial Science And Technology(aist)
-
Chen Wei
Institute Of Photonics Technologies National Tsing Hua University
-
MORIKAWA Yasuhiro
Institute for Semiconductor Technologies, ULVAC, Inc.
-
HAYASHI Toshio
Institute for Semiconductor Technologies, ULVAC, Inc.
関連論文
- Geometrical Effect of Mcrogroove Surface on Aligment of Liquid Crystal Molecules (情報ディスプレイ--The 6th Asian Symposium on Information Display & Exhibition)
- Geometrical Effect of Mcrogroove Surface on Alignmert of Liquid crystal Molecules
- A Quick Acting Gas Valve Driven through a Resistive Wall
- A Simple Vacuum Crowbar Switch up to 1 MA
- Mechanical Properties of Bulk Amorphous Zr-Al-Cu-Ni-Ag Alloys Containing Nanoscale Quasicrystalline Particles
- High Strength and Good Ductility of Bulk Quasicrystalline Base Alloys in Zr_Al_Ni_Cu_Pd_X System
- Etching Characteristics of Organic Polymers in the Magnetic Neutral Loop Discharge Plasma
- Investigations of Surface Reactions in Neutral Loop Discharge Plasma for High-Aspect-Ratio SiO_2 Etching
- Emergence of long period antiferromagnetic orders from Haldane phase in S=1 Heisenberg chains with D-modulation
- Polyketomycin, a New Antibiotic from Streptomyces sp. MK277-AF1 II. Structure Determination
- Polyketomycin, a New Antibiotic from Streptomyces sp. MK277-AF1 I. Taxonomy, Production, Isolation, Physico-chemical Properties and Biological Activities
- Production of 35 keV, 1 A Steady-State Ion Beam
- EVALUATION OF THE TILTED HOMEOTROPIC ALIGNMENT OF LIQUID-CRYSTAL MOLECULES USING THE RUBBING METHOD
- A Double-Layer Electrically Controlled Birefringence Liquid-Crystal Display with a Wide-Viewing-Angle Cone
- Tilted Homeotropic Alignment of Liquid-Crystal Molecules Using the Rubbing Method
- Alignment of Liquid Crystals on a Ferroelectric Transparent Ceramic Plate : L: LIQUID CRYSTALS
- Alignment of Ferroelectric Liquid Crystals on a Ferroelectric Transparent Ceramic Plate : L: Liquid Crystals
- Control of Surface Reaction on Highly Accurate Low-k Methylsilsesquioxane Etching Process : Nuclear Science, Plasmas, and Electric Discharges
- Magnetic Neutral Loop Discharge (NLD) Plasma and Application to SiO_2 Etching Process
- 1.3 μm InGaAs/InAlGaAs Strained Quantum Well Lasers on InGaAs Ternary Substrates
- Transmission Conditions of Vibration Stresses to Welding Specimens of Ultrasonic Plastic Welding using Various Two-Vibration-System Equipments
- Dry Etch Process in Magnetic Neutral Loop Discharge Plasma
- In_Ga_AS/InAlGaAs/InGaP Strained Double Quantum Well Lasers on In_Ga_As Ternary Substrate
- Separation of Gas Molecule Using Tetra-n-butyl Ammonium Bromide Semi-Clathrate Hydrate Crystals
- Refractive Index Variation of Amorphous Ta_2O_5 Film Fabricated by Ion Beam Sputtering with RF Bias Power
- Control of Liquid Crystal Aligment Using Stamped-Morphology Method
- Orientation of Polymer Molecules in Rubbed Alignment Layer and Surface Anchoring of Liquid Crystals
- Conelike Defect in Deep Quartz Etching Employing Neutral Loop Discharge
- A High Resolution Echelle Mortochrornator and Its Application to Ion Temperature Measurement of He Plasma
- Optically Compensated Bend Mode (OCB Mode) with Wide Viewing Angle and Fast Response (Special Issue on Liquid-Crystal Displays)
- Relationship between Rubbing Strength and Surface Anchoring of Nematic Liquid Crystal
- Relation between Rubbing Strength and Surface Anchoring of Nematic Liquid Crystal
- Measurements of Slow Theta Pinch Plasma by Mach-Zehnder Interferometer with Giant Pulse Ruby Laser
- Photoluminescence of Eu-Doped ZnO Phosphors
- Effect of auxin on the incorporation of proline into the naked protoplasm of Chara globularis
- Characteristics of Two-Vibration-System Ultrasonic Plastic Welding with 90 kHz and 20 kHz Vibration Systems at Right Angles
- Organic Low-k Dielectric Material Etching by CH_3NH_2/N_2 Plasma