Uchida Taijiro | Institute Of Plasma Physics Nagoya University
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概要
関連著者
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Uchida Taijiro
Institute Of Plasma Physics Nagoya University
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Uchida Taijiro
Institute For Semiconductor Technologies Ulvac Inc.
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Uchida T
Institute For Semiconductor Technologies Ulvac Inc.
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KAWASAKI Sunao
Institute of Plasma Physics, Nagoya University
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MORIKAWA Yasuhiro
Institute for Semiconductor Technologies, ULVAC, Inc.
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HAYASHI Toshio
Institute for Semiconductor Technologies, ULVAC, Inc.
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Kawasaki Sunao
Institute For Nuclear Study University Of Tokyo:(present Address) Institute Of Plasma Physics Nagoya
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MIYAMOTO Kenro
Institute of Plasma Physics, Nagoya University
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Uchida Tsutomu
National Institute Of Advanced Industrial Science And Technology(aist)
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AKIYAMA Ryuichi
Institute of Plasma Physics, Nagoya University
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Miyamoto Kenro
Institute Of Plasma Physics Nagoya University
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Akiyama Ryuichi
Institute Of Plasma Physics Nagoya University
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林 卓
Department Of Materials Science Shonan Institute Of Technology
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Uchida Tajiro
Institute For Semiconductor Technologies Ulvac Inc.
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Uchida T
Mitsubishi Electric Corp. Hyogo Jpn
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FUJITA Junji
Institute of Plasma Physics, Nagoya University
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Chen Wei
Institute Of Photonics Technologies National Tsing Hua University
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Hayashi T
Research Laboratory Oki Electric Industry Co. Ltd.
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INOUE Nobuyuki
Institute of Plama Physics, Nagoya University
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Hayashi T
Nisshin Electric Co.
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Hayashi Tsukasa
R D Division Nissin Electric Co. Ltd.
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Ando Kozo
Institute Of Physical And Chemical Research
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HAYASE Kiyoshi
Department of Electronics, Faculty of Engineering, Nagoya University
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Hayase Kiyoshi
Department Of Electronic Engineering Faculty Of Engineering Nagoya University
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Hayashi Takahisa
Vlsi Research & Development Center Oki Electric Industry Co Ltd.
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Hayashi Takafumi
Department Of Applied Physics Faculty Of Engineering The University Of Tokyo
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Hayashi Toshiyuki
Department Of Mechanical Engineering Nagoya University
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Hayashi Takayoshi
Advanced Research Institute For Science And Engineering Waseda University
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Hayashi Takayoshi
Musashino Electrical Communication Laboratory Nippon Telegraph And Telephone Public Corporation
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林 卓
マテリアル工学科
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Fujita Junji
Institute Of Plasma Physics Nagoya University
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Uchida Tatsuo
Tohoku University
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Morikawa Y
Institute For Semiconductor Technologies Ulvac Inc.
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Inoue Nobuyuki
Institute Of Plasma Physics Nagoya University
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OTSUKA Masamoto
Institute of Plasma Physics, Nagoya University
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Otsuka Masamoto
Institute Of Plasma Physics Nagoya University
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SUZUKI Yasuo
Institute of Symbiotic Science and Technology, Tokyo University of Agriculture and Technology
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MORI Kazuo
Institute of Physical and Chemical Research
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ISHIMARU Tsutomu
Deparment of Engineering, Osaka University
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Ishimaru Tsutomu
Deparment Of Engineering Osaka University
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Morikawa Yasuhiro
Institute For Semiconductor Technologies Ul Va C Japan Lid.
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Inoue Nobuyuki
Institute Of Plama Physics Nagoya University
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HAYASHI Teru
Research Laboratory of Precision Machinery and Electronics,Tokyo Institute of Technology
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Mori Kazuo
Institute Of Biological Sciences And Shimoda Marine Research Center University Of Tsukuba
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Suzuki Yasuo
Institute Of Plama Physics Nagoya University
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KAWASAKI Sunao
Institute of Plasma Physics, Nagoya, University
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FUJITA Junji
Institute of Plama Physics, Nagoya University
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Hayashi Toshio
Institute for Semiconductor Technologies, ULVAC Japan Ltd., 2500 Hagisono, Chigasaki, Kanagawa 253-8543, Japan
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MIYAMOTO Kenro
Institute of Plasma Physics, Nagoya, University
著作論文
- A Quick Acting Gas Valve Driven through a Resistive Wall
- A Simple Vacuum Crowbar Switch up to 1 MA
- Etching Characteristics of Organic Polymers in the Magnetic Neutral Loop Discharge Plasma
- Investigations of Surface Reactions in Neutral Loop Discharge Plasma for High-Aspect-Ratio SiO_2 Etching
- Control of Surface Reaction on Highly Accurate Low-k Methylsilsesquioxane Etching Process : Nuclear Science, Plasmas, and Electric Discharges
- A High Resolution Echelle Mortochrornator and Its Application to Ion Temperature Measurement of He Plasma
- Measurements of Slow Theta Pinch Plasma by Mach-Zehnder Interferometer with Giant Pulse Ruby Laser