3D-Computer Simulation of Ion-Beam Deflection Caused by the Displacement of Extraction Electrodes

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1984-09-20

著者

• Uchida Tajiro

  Institute For Semiconductor Technologies Ulvac Inc.

• Ota Kazuya

  Aset Euvl Laboratory

• Ota Kazuya

  System Designing Section Designing Department Industrial Supplies & Equipment Division Nikon Cor

• Uchida T

  Mitsubishi Electric Corp. Hyogo Jpn

• Uchida Taijiro

  Department Of Nuclear Engineering Faculty Of Engineering University Of Tokyo

• NIHEI Hitoshi

  Department of Quantum Engineering and systems Science, School of Engineering, the University of Toky

• MORIKAWA Junji

  Department of Nuclear Engineering, Faculty of Engineering, The University of Tokyo

• Inoue Nobuyuki

  Department of Nuclear Engineering, University of Tokyo

• Uchida Taijiro

  Department Of Nuclear Engineering Faculty Of Engineering The University Of Tokyo:(present Address) I

• Ota K

  Univ. Tsukuba Ibaraki Jpn

• OTA Kanji

  Department of Nuclear Engineering, Faculty of Engineering, the University of Tokyo

• Nihei H

  Univ. Tokyo Tokyo Jpn

• Nihei Hitoshi

  Department Of Nuclear Engineering Faculty Of Engineering The University Of Tokyo

• Inoue N

  School Of Engineering University Of Tokyo

• Inoue Nobuyuki

  Department Of Nuclear Engineering Faculty Of Engineering The University Of Tokyo

• Morikawa Junji

  Department Of Nuclear Engineering Faculty Of Engineering The University Of Tokyo

• Ishida Shuichi

  Division Of Cardiovascular Medicine Department Of Internal Medicine Ohmori Hospital Toho University

• Ota Keishin

  Tsukuba Advanced Research Alliance Center University Of Tsukuba

• Inoue N

  Univ. Tokyo Tokyo

• Inoue Nobuyuki

  Department Of Cardiovascular Surgery Kitasato University School Of Medicine

• MORIKAWA Junji

  Department of Advanced Energy, Graduate School of Frontier Sciences, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561, Japan

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