Computer Simulation of Ion Beams for the Design of Three-Electrode Ion Extraction System
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概要
- 論文の詳細を見る
The divergence of ion beams extracted from a three-electrode extraction system (positive, negative, and grounded electrode) with circular apertures is calculated numerically by using a digital computer. The beam divergence depends on the shapes and sizes of the apertures, the spacings between them and other parameters such as the electrodes' potentials, the current density emitted from the source plasma surface and the curvature of the plasma surface which is fixed. A circular aperture electrode gives a smaller beam divergence in comparison with a slit electrode. The results of the computation are available for experiments to study an optimum extraction system.
- 社団法人応用物理学会の論文
- 1976-01-05
著者
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Uchida Tajiro
Institute For Semiconductor Technologies Ulvac Inc.
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Uchida T
Mitsubishi Electric Corp. Hyogo Jpn
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Uchida Taijiro
Department Of Nuclear Engineering Faculty Of Engineering University Of Tokyo
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NIHEI Hitoshi
Department of Quantum Engineering and systems Science, School of Engineering, the University of Toky
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Inoue Nobuyuki
Department of Nuclear Engineering, University of Tokyo
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Uchida Taijiro
Department Of Nuclear Engineering Faculty Of Engineering The University Of Tokyo:(present Address) I
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Nihei H
Univ. Tokyo Tokyo Jpn
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Nihei Hitoshi
Department Of Nuclear Engineering Faculty Of Engineering The University Of Tokyo
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Inoue N
School Of Engineering University Of Tokyo
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Inoue Nobuyuki
Department Of Nuclear Engineering Faculty Of Engineering The University Of Tokyo
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Ohara Yoshihiro
Department Of Nuclear Engineering Faculty Of Engineering University Of Tokyo:(present Address) Divis
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ASAI Kenichi
Department of Nuclear Engineering, Faculty of Engineering, University of Tokyo
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Inoue N
Univ. Tokyo Tokyo
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Inoue Nobuyuki
Department Of Cardiovascular Surgery Kitasato University School Of Medicine
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Asai Kenichi
Department Of Nuclear Engineering Faculty Of Engineering University Of Tokyo
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Asai Kenichi
Department Of Information Science Faculty Of Science Ochanomizu University
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