Microwave Plasma Source for Ion Sources with Multipolar and Axial Magnetic Fields
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概要
- 論文の詳細を見る
A microwave (2.45 GHz) plasma source for ion sources has been constructed and its chracteristics have been examined. It consists of the part of the source generating a plasma and that making the plasma uniform. The experiments have been conducted in four kinds of magnetic field configurations generated by solenoid coils and arrays of permanent magnets. The plasma parameters have been measured with a Lngmuir probe located at 2 cm above a plasma grid. The uniform plasma over an area of 8〜10 cm・φ in diameter and the density of 2.6×10^<11>cm^<-3> has been produced. The magnetic field intensity near the plasma grid is nearly zero.
- 社団法人応用物理学会の論文
- 1990-05-20
著者
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NIHEI Hitoshi
Department of Quantum Engineering and systems Science, School of Engineering, the University of Toky
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MORIKAWA Junji
Department of Nuclear Engineering, Faculty of Engineering, The University of Tokyo
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Inoue Nobuyuki
Department of Nuclear Engineering, University of Tokyo
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Nihei H
Univ. Tokyo Tokyo Jpn
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Nihei Hitoshi
Department Of Nuclear Engineering Faculty Of Engineering The University Of Tokyo
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Inoue N
School Of Engineering University Of Tokyo
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Inoue Nobuyuki
Department Of Nuclear Engineering Faculty Of Engineering The University Of Tokyo
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Morikawa Junji
Department Of Nuclear Engineering Faculty Of Engineering The University Of Tokyo
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Inoue N
Univ. Tokyo Tokyo
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Inoue Nobuyuki
Department Of Cardiovascular Surgery Kitasato University School Of Medicine
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MORIKAWA Junji
Department of Advanced Energy, Graduate School of Frontier Sciences, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561, Japan
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