Design of a 200 kV Focused Ion Beam Surface Analysis System
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概要
- 論文の詳細を見る
A nanometer nondestructive three-dimensional Rutherford back scattering (RBS) and medium energy ion scattering (MEIS) analysis system with a compact 200 kV focused ion beam (FIB) column has been designed. A high-vacuum sample chamber with a six-axis goniometer and an electrostatic toroidal analyzer for channeling and RBS analysis are connected to the acceleration column. A minimum beam spot size of less than 50 nm with a current of 50 pA is estimated by calculation for a 400 keV Be^<++> ion beam. As compared with MeV proton or helium ion microprobes, this compact system can produce about 10 times finer microprobes, 900-1600 times larger scattering cross section and higher depth resolution.
- 社団法人応用物理学会の論文
- 1992-12-30
著者
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Aihara Ryuso
Eiko Engineering Co. Ltd.
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Takai Mikio
Faculty Of Engineering Science And Research Center For Extreme Materials (rcem) Osaka University
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Takai Mikio
Faculty Of Engineering Science And Research Center For Extreme Materials Osala University
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MIMURA Ryoh
EIKO Engineering Co., Ltd.
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SAWARAGI Hiroshi
EIKO Engineering Co., Ltd.
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Sawaragi Hiroshi
Eiko Engineering Co. Ltd.
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Mimura Ryoh
Eiko Engineering Co. Ltd.
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