3. 誘導結合プラズマ : プロセス用の新しい高密度プラズマの生成と診断 III

概要

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This paper briefly reviews the diagnostics of inductively-coupled plasmas(ICP)from the viewpoint of power-trasfer efficiency ξ, which is the ratio of net power deposited into plasma to total power into the matching network. The ICP is produced by a conventional external antenna and a plasma-immersed internal antenna. The measurements of ξ reveal that, even in ICPs, the power transfer to the plasma is governed by capacitive coupling in the low-density region(<10^9cm^<-3>), but that an inductive coupling becomes dominant as the electron density increases. The measured density dependence of ξ agrees with the theoretical dependence predicted by an equivalent circuit model with a stochastic heating process taken into account. The internal antenna has a higher power transfer efficiency than the external antenna. A significant density jump observed in the external antenna is caused by the mode transition between a capacitive and an inductive discharge, and a mechanism for the density jump is explained well in terms of the density dependence of the power-transfer efficiency.
社団法人プラズマ・核融合学会の論文
1998-02-25