Si Substrate Resistivity Design for On-Chip Matching Circuit Based on Electro-Magnetic Simulation
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概要
- 論文の詳細を見る
For on-chip matching Si-MMIC fabricated on a conventional low resistivity Si substrate, the loss of on-chip inductors is quite high due to the dielectric loss of the substrate. In order to reduce the loss of on-chip matching circuit, the use of high resistivity Si substrate is quite effective. By using electromagnetic simulation, the relationship between coplanar wave-guide (CPW) transmission line characteristics and the resistivity of Si substrate is discussed. Based on the simulated results, the resistivity of Si substrate is designed to achieve lower dielectric loss than conductor loss. The effectiveness of high resistivity Si substrate is evaluated by the extraction of equivalent circuit model parameters of the fabricated on-chip spiral inductors and the measurement of the fabricated on-chip matching Si-MMIC LNA's.
- 社団法人電子情報通信学会の論文
- 2001-07-01
著者
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SUEMATSU Noriharu
Kamakura Works, Mitsubishi Electric Corporation
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Ikeda Y
Mitsubishi Electric Corporation Information Technology R&d Center
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Ikeda Y
Mitsubishi Electric Corp. Kamakura‐shi Jpn
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Takagi T
Optical Interconnection Sumiden Laboratory Rwcp
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TAKAGI Tadashi
Information Technology R&D Center, Mitsubishi Electric Corporation
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ISHIDA Osami
Information Technology R&D Center, Mitsubishi Electric Corporation
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SUEMATSU Noriharu
Information Technology R&D Center, Mitsubishi Electric Corporation
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Nakajima Kensuke
Information Technology R&d Center Mitsubishi Electric Corporation
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Suematsu Noriharu
Kamakura Works Mitsubishi Electric Corporation
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Suematsu Noriharu
Information Technology R & D Center Mitsubishi Electric Corporation
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Suematsu Noriharu
Information Technology R Amp D Center Electro-optics Amp Microwave System Laboratory Mitsubishi Elec
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Takagi T
Research Institute Of Electrical Communication Tohoku University
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Takagi T
It-21 Center Research Institute Of Electrical Communications Tohoku University
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ONO Masayoshi
Information Technology R&D Center, Mitsubishi Electric Corporation
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KUBO Shunji
System LSI Divison, Mitsubishi Electric Corporation
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IYAMA Yoshitada
Information Technology R&D Center, Mitsubishi Electric Corporation
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Takagi Tadashi
Information Technology R&d Center Mitsubishi Electric Corporation
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Ishida O
Information And Communications Univ. Daejon Kor
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Ishida Osami
Information And Communications University
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Ono Masayoshi
Information Technology R&d Center Mitsubishi Electric Corporation
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Iyama Y
Kamakura Works Mitsubishi Electric Corporation
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Kubo S
Ntt Basic Research Laboratories Nippon Telegraph And Telephone Corporation
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Karimoto S
Ntt Basic Res. Lab. Kanagawa Jpn
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