817 摩擦力顕微鏡機構による単結晶シリコンへの3次元微細構造のマスクレス形成(マイクロ加工)(OS.1 生産加工・工作機械)

概要

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The research that micro-machining of the square on the surface (100) of single crystal silicon by the machining cantilever installed in friction force microscope is presented in this paper. It was found that the machined area is changed into striking convex after the work piece is etched by KOH solution. The relation that the height of the convex depends on the machining conditions especially on the density of KOH solution is understood. Moreover, the efficiency of ultrasonic cleaning with etching to improving the roughness and removing of the remained is confirmed. And the method of maskless formation of micro-structure as the application of the experimental results is proposed.
一般社団法人日本機械学会の論文
2001-03-09