走査電子顕微鏡を用いた非球面形状測定法に関する研究

概要

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Optical methods have been proposed for the profile measurement of aspheric lens, but further investigation is needed to improve the accuracy of the machining. A method for the measurement of small-diameter lenses was developed using a scanning electron microscope. Photo-semiconducdors were used to detect backscattered electrons which were reflected on the surface of the lens. A new simple algorithm which makes it possible to derive direction angle and slant angle of the normal at the respective observed points was proposed. The slope of a plastic aspheric lens was measured in terms of the normal. Contour circles of equi-slope were illustrated. The difference in the radii of the circles for that the slope was varied with constant step was deformed due to the aspherity. A profile of the aspherity along the radial direction could be obtained by integrating the slope. The error from the designed profile could be evaluated based on the result.
一般社団法人日本機械学会の論文
1989-07-25