プラスチックの走査電子顕微鏡(SEM)による形状測定の試み

概要

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Measurement method of surface profile by using scanning electron microscope (SEM) was applied to plastic materials, which have needed other method than the conventional ones such as optical method, needle trace method and others. The method by SEM has advantage in accurate and non-destructive measurement. Metal coat on surface is required for plastics in SEM environment. SEM using four detectors which was developed for the measurement of surface profile was used. Standard specimen of sphere made from polystyrene whose diameter was 0.03 mm was adopted. It was made obvious that sufficient time for coat such as 10 min is required for stable output intensity to derive the profile. Correlation between emission voltage of electron beam and the output intensity for the profile in terms of coating time indicates that adequate emission voltage which effectively represents the profile can be taken depending on thickness of coat. Accurate measurement is shown possible for the profile of cut surface of acryl and for the sphere of small ruby ball.
一般社団法人日本機械学会の論文
1991-10-25