超音波顕微鏡を用いた研削時熱影響層の深さ計測

概要

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An acoustic technique for measuring the thickness of a metallurgically damaged layer on a ground surface was investigated. The approach requires the measurement of dispersive surface acoustic wave (SAW) velocity and reflection power from the machined surface. The theory of elasticity was employed to verify the correlation of acoustic material signature (AMS) with thickness. The measurement and data processing were conducted by a computer-controlled system, and obtained results were illustrated in terms of contour map. It was shown that he measured distribution of thickness agreed well with the result obtained by conventional destructive inspection owing to chemical etching. The technique utilizing SAW velocity dispersion was shown available, in case that the SAW attenuation in both affected layer and matrix is negligibly small. It could be similarly evaluated by the reflection power of AMS to the matrix in which the SAW attenuation is significant.
社団法人日本機械学会の論文
1989-01-25