焼結ダイヤモンド製マイクロ研削工具に対する砥粒平坦化ツルーイングとドレッシング技術(機械要素,潤滑,設計,生産加工,生産システムなど)

概要

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A truing and dressing technique that can produce separated and flattened diamond grains on a hemispherical tool working surface with a radius of 50μm was developed for the microgrinding tool made of polycrystalline diamond (PCD). Truing by electrical discharge machining (EDM) and grinding were conducted to form the tip of the PCD tool into a hemisphere with a flat surface using a diamond disk made by chemical vapor deposition (CVD) as an electrode and a truer. In addition, dressing by EDM and electrochemical machining (ECM) were conducted to separate the covalent linkage of diamond grains on the tool working surface. It was verified through the grinding test that a PCD microgrinding tool dressed by ECM has the potential to efficiently fabricate a fine surface with surface roughness of less than 10nm Rz on the cemented carbide with hardness of 2600Hv.
2010-11-25