1403 半球状・極微粒ダイヤモンド電鋳工具に対するマイクロツルーイング技術の開発(S78-1 高機能研削加工(1),S78 高機能研削加工)

概要

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Microtruing that can adjust a protrusion height of diamond grains from the tool axis should be conducted to microgrinding tools when fabricating ultraprecise microstructures in which a tool of minute diameter is rotated at high speed. Mechanical microtruing, in which sharp edges of diamond grains on the tool surface are worn out by contacting minute diamond grains, was conducted to electroformed diamond tools by using elastically supported electroplated diamond tool as a truer. It was verified through the grinding test that conducting microtruing to the microtruing was effective to generate smooth ground surfaces. However the pressure controlled mechanical microtruing was insufficient to fabricate sharp edges of diamond grains on the tool surface to flat face, namely, the highly precise tool geometry could not be obtained, so that ground surface under 80nm Ry in surface roughness could not be obtained.
一般社団法人日本機械学会の論文
2006-09-15