油性スラリーを用いた複合粒子研磨法に適する工具プレートの検討(機械要素,潤滑,工作,生産管理など)

概要

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A polishing pad has been playing a crucial role in conventional mirror polishing though many problems occur such as process instability, polishing non-uniformity and maintaining difficulties etc. Recently, a new mirror polishing method, which uses fine polymer particles, has been proposed and developed for overcoming the problems. At the same time, the feasibility of this new method when using oil as dispersion medium has been certified as well for polishing the materials unstable in water. In this paper, the tool plate, one of the most important elements in the new method, has been investigated to find an optimal type for the new polishing method when using oily slurries. Several kinds of tool plates have been discussed about the polishing characteristics and it is clear that the tool plate must have not only proper roughness and high rigidity, but also good affinity to the slurry. Furthermore a thin elastic layer covering on the surface of a hard tool plate is desirable. In addition, the urethane rubber plate with high hardness and tensile strength is the best one with relatively superior polishing characteristics, endurance and easiness of surface preparing among the discussed plates up to now.
社団法人日本機械学会の論文
2005-12-25