ガラス研磨における酸化セリウムの代替砥粒開発

概要

論文の詳細を見る
In glass polishing process, cerium oxide (CeO2) abrasives are widely used because both high removal rate and high-quality surface finish can be easily obtained. The metal component cerium (Ce), however, is one of the rare earth elements. Recently, because of the problems of the skyrocketing price increase and the supply risk of the CeO2, the development on alternative materials/technologies and reducing consumption of cerium oxide abrasives have been strongly requested. In response to the requests, the authors have proposed the zirconium oxide (ZrO2) abrasive as the alternative abrasive of the cerium oxide. Even under the low slurry supply rate, a larger number of effective abrasives between the work and pad can realize the better polishing characteristics. Two methods have been proposed to increase the number of effective abrasives on the polishing pad. The first method is to use the cohesive abrasives during polishing and the second is increasing stagnation of the abrasives during processing. Based on these results, it has been confirmed that the zirconium oxide abrasives have the possibility as alternative abrasive of the cerium oxide for glass polishing. This paper describes that the results of the series of tests proved high polishing characteristics in terms of the surface roughness and removal rate for soda-lime glass.