延性モード切削における高精度初期接触検知技術

概要

論文の詳細を見る
In order to realize ductile regime cutting of brittle materials,it is important to determine the initial contact between a tool and a workpiece with high accuracy. Thus the detection of initial contact in diamond turning of Al and Si was examined using an AE transducer. The sensitivity and the response speed of an AE signal were evaluated in comparison with those of an electric contact signal. Treatments to improve the conductivity of a diamond needle as a tool and a Si wafer as a workpiece were made in order to determine an electric signal representing the initial contact between a tool and a workpiece. The resistance of 65Ωwas obtained by spattering of a diamond needle using Ar ions. The resistance of a Si substrate was reduced to 300Ω by doping P ions into it. As a result, the detection of initial contact during cutting of a Si substrate was accomplished on the 1O nm level. Moreover, the sensitivity of detection using an AE transducer was found to depend on the impact energy ; thus, the sensitivity was improved with the cutting speed.
社団法人日本機械学会の論文
1996-01-25