逐次二点報を用いた超精密真直度測定に関する研究 : 補間測定による高精度化の試み

概要

論文の詳細を見る
The sequential two-point method is a new method of straightness measurement with a simple algorithm which does not need a specific base line. Advantages of the method such as measurement of both the accuracy of tool movement and cut surface by the single path of data acquisition, good accuracy for the repeated measurement, and stable measurement even for dynamic conditions have been pointed out. In this paper, in addition to these, it is proposed that the accuracy can be improved by making use of the data which are interpolated by feeding the sensor device with shorter steps than the distance of the two sensors. The effectiveness of the method is proved by measuring the profile of aluminum thin film pasted on an aluminum disc cut by a diamond tool. It is also made obvious that the measured straightness can be corrected by adopting a series of the interpolated data whose distance is just equal to that of the sensors.
一般社団法人日本機械学会の論文
1991-10-25