A study of deposition single crystal SiCN thin film on porous silicon for ultraviolet light detecting applications
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概要
- 論文の詳細を見る
- 2007-09-19
著者
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Chou Tse-heng
Vlsi Technology Laboratory Institute Of Microelectronics Department Of Electrical Engineering Nation
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Fang Yean-kuen
Vlsi Technology Lab. Institute Of Microelectronics Ee Department National Cheng Kung University No.
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Huang J
Department Of Metallurgy School Of Engineering The University Of Tokyo Now At: Central Research Labo
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Chou Tse-heng
Vlsi Technology Laboratory Institute Of Microelectronics Department Of Electrical Engineering Nation
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Fang Yean-kuen
Vlsi Technology Laboratory Institute Of Microelectronics Department Of Electrical Engineering Nation
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KUO Ta-Wei
VLSI Technology Laboratory, Institute of Microelectronics, Department of Electrical Engineering, Nat
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JAW D.
Department of Electronic Engineering, Wufeng Institute of Technology
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LAI F.
Department of Electronic Engineering, Wufeng Institute of Technology
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SHIE J.
Department of Electronic Engineering, Wufeng Institute of Technology
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Kuo Ta-wei
Vlsi Technology Laboratory Institute Of Microelectronics Department Of Electrical Engineering Nation
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Huang J
Department Of Applied Chemistry East China Institute Of Technology
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Shie J.
Department Of Electronic Engineering Wufeng Institute Of Technology
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Jaw D.
Department Of Electronic Engineering Wufeng Institute Of Technology
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