TEM and HRTEM Observations of Microstructural Change of Silicon Single Crystal Scratched under Very Small Loading Forces by AFM

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概要

• 論文の詳細を見る
• Japan Institute of Metalsの論文
• 2008-06-01

著者

• IWATA Hiroyuki

  Department of Molecular Pathogenesis, Nagoya University School of Medicine

• Sasaki Katsuhiro

  Department Of Physics Graduate School Of Science Tohoku University

• Takagi Makoto

  Department Of Organic Synthesis Faculty Of Engineering Kyushu University

• Onodera Kenji

  Graduate School Aichi Institute Of Technology

• SAKA Hiroyasu

  Department of Quantum Engineering, Nagoya University

• MATSUMURO Akihito

  Department of Mechanical Engineering, Nagoya University

• Matsumuro Akihito

  Department Of Mechanical Engineering Aichi Institute Of Technology

• Saka Hiroyasu

  Department Of Merallurgy Faculty Of Ecgineering Nagoya University

• Takagi Makoto

  Department Of Mechanical Engineering Aichi Institute Of Technology

• Takagi Makoto

  Department Of Chemical Science And Technology Faculty Of Engineering Kyushu University

• Iwata Hiroyuki

  Department Of Electrical And Electronics Engineering Aichi Institute Of Technology

• Sasaki Katsuhiro

  Department of Electrical and Electronic Engineering, Faculty of Engineering and Resource Science, Akita University, 1-1 Tegata Gakuen-machi, Akita 010-8502, Japan

• IWATA HIROYUKI

  Department of Applied Chemistry, Graduate School of Engineering, Tokyo Metropolitan University

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