Production of Metastable Defects in n-Type Silicon by Hydrogen Implantation at 88K
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概要
- 論文の詳細を見る
- 2003-11-15
著者
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SUGIYAMA Takahide
Department of Urology, Kinki University School of Medicine
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IWATA Hiroyuki
Department of Molecular Pathogenesis, Nagoya University School of Medicine
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Tokuda Yutaka
Depertment Of Electronics Aichi Institute Of Technology
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Tokuda Yutaka
Department Of Surgery Tokai University School Of Medicine
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Sugiyama Takahide
Toyota Central R&d Labs. Inc.
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KANAZAWA Shigeki
Department of Electronics, Aichi Institute of Technology
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ISHIKO Masayasu
Toyota Center R&D Labs., Inc.
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