Deep-Level Transient Spectroscopy Detection of Iron in Hydrogenated p^+ Silicon : Semiconductors
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2001-06-01
著者
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Tokuda Yutaka
Department Of Surgery Tokai University School Of Medicine
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Shiraki Hiroyuki
Mitsubishi Materials Silicon Corporation
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Shiraki Hiroyuki
Mitsubishi Materials Co . Ltd. Central Research Institute
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Tokuda Yutaka
Department Of Breast And Endocrine Surgery Tokai University School Of Medicine
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NAMIZAKI Takashi
Department of Electronics, Aichi Institute of Technology
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MURASE Tomomi
Department of Electronics, Aichi Institute of Technology
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HASEGAWA Takeshi
Silicon Research Center, Mitsubishi Materials Corporation
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TOKUDA Yutaka
Department of Electronics, Aichi Institute of Technology
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Murase Tomoki
Department of Electronics, Aichi Institute of Technology
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