Effect of Oxygen Impurity on the Production of Room-Temperature Stable Metastable Defects in n-Type Silicon Implanted with Hydrogen Ions at 88K
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概要
- 論文の詳細を見る
- 2004-06-15
著者
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IWATA Hiroyuki
Department of Molecular Pathogenesis, Nagoya University School of Medicine
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Tokuda Yutaka
Depertment Of Electronics Aichi Institute Of Technology
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Tokuda Yutaka
Department Of Surgery Tokai University School Of Medicine
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Sugiyama Takahide
Toyota Central R&d Labs. Inc.
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ISHIKKO Masayasu
Toyota Central R&D Labs., Inc.
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