Low-Frequency Air-Coupled Ultrasonic System beyond Diffraction Limit Using Pinhole
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概要
- 論文の詳細を見る
A novel noncontact air-coupled ultrasonic system introducing a conical acoustic probe (CAP) with a pinhole is constructed at low frequency. A 40 kHz ultrasonic wave in air goes through the pinhole, which has a diameter much smaller than the ultrasonic wavelength $\lambda$ ($\simeq 9$ mm), and forms a unique sound field. The lateral $-3$ dB widths of both theoretical and experimental sound fields approximately coincide with the pinhole diameter. A lateral resolution of $\lambda/30$ (0.3 mm) beyond the diffraction limit has been achieved using this system. As an application of the system, the surface profile for a 0.5 mm$\phi$ ($\lambda/18$) drilled hole in an aluminum plate was successfully imaged. The surface topographical profile of a step difference of 1 μm ($\lambda/9000$) was also measured.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2006-05-30
著者
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Sasaki Katsuhiro
Department Of Physics Graduate School Of Science Tohoku University
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Imano Kazuhiko
Department Of Electrical & Electronic Engineering Mining College Akita University
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Nishihira Morimasa
Department Of Electrical And Electronic Engineering Faculty Of Engineering And Resource Science Akit
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