Electron holographic mapping of two-dimensional doping areas in cross-sectional device specimens prepared by the lift-out technique based on a focused ion beam

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概要

• 論文の詳細を見る
• 2004-04-01

著者

• Sasaki Katsuhiro

  Department Of Physics Graduate School Of Science Tohoku University

• Hirayama Tsukasa

  Japan Fine Ceramics Center

• SAKA Hiroyasu

  Department of Quantum Engineering, Nagoya University

• Wang Zhouguang

  Japan Fine Ceramics Center

• Saka H

  Department Of Quantum Engineering Nagoya University

• Sakaki Katsuhiro

  Department Of Quantum Engineering Nagoya University

• WANG Zhou-Guang

  Japan Fine Ceramics Center

• KATO Naoko

  Structural Analysis, International Test and Engineering Services Co. Ltd

• Hirayama T.

  Japan Fine Ceramics Center

• Kato Naoko

  Structural Analysis International Test And Engineering Services Co. Ltd

• Saka Hiroyasu

  Department Of Merallurgy Faculty Of Ecgineering Nagoya University

• Hirayama T

  Japan Fine Ceramics Center Nagoya Jpn

• Sasaki Katsuhiro

  Dep. Of Quantum Engineering Nagoya Univ.

• Sasaki Katsuhiro

  Department of Electrical and Electronic Engineering, Faculty of Engineering and Resource Science, Akita University, 1-1 Tegata Gakuen-machi, Akita 010-8502, Japan

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