Side-milling technique of preparing device cross-sections for electron holography based on a focused ion beam micro-sampling system

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概要

• 論文の詳細を見る
• 2004-10-01

著者

• Hirayama Tsukasa

  Japan Fine Ceramics Center

• KATO Takeharu

  Japan Fine Ceramics Center

• Kato Takeharu

  Materials Research And Development Laboratory Japan Fine Ceramics Center

• Wang Zhouguang

  Japan Fine Ceramics Center

• Hirayama T.

  Japan Fine Ceramics Center

• Hirayama T

  Japan Fine Ceramics Center Nagoya Jpn

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