Improved phase-detection method using an air-coupled ultrasonic wave for a few-tens of nanometers displacement measurements
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概要
- 論文の詳細を見る
To enhance the phase sensitivity of ultrasonic signals, phases of the multi-reference-wave are arranged around the maximum phase-sensitive region. The resolution of the phase detection is improved by magnifying the maximum sensitive phase detection outputs. A resolution of 40nm displacement (λ/200, 000) using 40kHz air-coupled ultrasonic waves has been achieved.
- （社）電子情報通信学会の論文
著者
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Imano Kazuhiko
Department Of Electrical And Electronic Engineering Faculty Of Engineering And Resource Science Akit
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Sasaki Katsuhiro
Department Of Physics Graduate School Of Science Tohoku University
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NISHIHIRA Morimasa
Department of Electrical and Electronic Engineering, Faculty of Engineering and Resource Science, Ak
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