Nanometer-Order Resolution Displacement Measurement System by Air-Coupled Ultrasonic Wave Introducing Maximum Phase-Sensitivity Tuning
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概要
- 論文の詳細を見る
An improved system introducing an automatic tuning of the maximum phase sensitivity of ultrasonic signals is constructed for detecting displacements with a nanometer-order resolution. The phases of multiple-reference waves introduced in our previous system are controlled and appropriately set to tune the phase sensitivity. To evaluate our system, the displacement of a high-precision mechanical stage was measured using 40 kHz air-coupled ultrasonic waves. The resolution of the phase detection for our system is improved more than ten times our previous system. A resolution of 40 nm ($\lambda/200{,}000$) displacement has been achieved with a measurable displacement range of 8 mm (${\simeq}\lambda$).
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2005-06-15
著者
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Sasaki Katsuhiro
Department Of Physics Graduate School Of Science Tohoku University
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Imano Kazuhiko
Department Of Electrical & Electronic Engineering Mining College Akita University
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Nishihira Morimasa
Department Of Electrical And Electronic Engineering Faculty Of Engineering And Resource Science Akit
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Nishihira Morimasa
Department of Electrical and Electronic Engineering, Faculty of Engineering and Resource Science, Akita University, 1-1 Tegata Gakuen-machi, Akita 010-8502, Japan
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Imano Kazuhiko
Department of Electrical and Electronic Engineering, Faculty of Engineering and Resource Science, Akita University, 1-1 Tegata Gakuen-machi, Akita 010-8502, Japan
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Sasaki Katsuhiro
Department of Electrical and Electronic Engineering, Faculty of Engineering and Resource Science, Akita University, 1-1 Tegata Gakuen-machi, Akita 010-8502, Japan
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