Low-Temperature Deposition of Polycrystalline Titanium Oxide Tin Film on Si Substrate Using Supercritical Carbon Dioxide Fluid

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概要

• 論文の詳細を見る
• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2005-04-15

著者

• UCHIDA Hiroshi

  Department of Materials and Life Sciences, Sophia University

• Otsubo Akiko

  Department Of Chemistry Sophia University

• KODA Seiichiro

  Department of Chemistry, Faculty of Science and Technology, Sophia University

• Itatani K

  Department Of Chemistry Faculty Of Science And Technology Sophia University

• Itatani Kiyoshi

  Dep. Of Materials And Life Sciences Fac. Of Sci. And Engineering Sophia Univ.

• Koda S

  Univ. Tokyo Tokyo Jpn

• ITATANI Kiyoshi

  Department of Chemistry, Faculty of Science and Technology, Sophia University

• Uchida Hiroshi

  Department Of Materials And Life Sciences Faculty Of Science And Technology Sophia University

• Koda Seiichiro

  Department Of Chemical Engineering Facutly Of Engineering The University Of Tokyo

• Uchida Hiroshi

  Department Of Earth System Science And Technology Interdisciplinary Graduate School Of Engineering S

• Uchida Hiroshi

  Department Of Anesthesia Tottori Prefectural Central Hospital

• Uchida Hiroshi

  Department Of Chemistry Faculty Of Science And Technology Sophia University

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