Emission from Pulsating Combustion of Silane at a Reduced Pressure : Chemistry (incl, physical process)
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概要
- 論文の詳細を見る
A pulsating combustion was found to continue successively, after a mixture of flowing SiH_4/He and O_2 was ignitied by appropriate means in a Pyrex vessel at a total pressure of ca. 400 Pa. Light emission in the UV and visible region was spectroscopically resolved to be composed of band emissions of SiO(A^〜X^〜) and OH(A^〜X^〜), as well as a broad emission in the visible region. These findings were discussed from the mechanistic viewpoints of silane combustion and chemical vapor deposition of SiO_2 films.
- 社団法人応用物理学会の論文
- 1988-10-20
著者
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Koda Seiichiro
Department Of Chemical Engineering Facutly Of Engineering The University Of Tokyo
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SUGA Shinsuke
Department of Reaction Chemistry, Faculty of Engineering, The University of Tokyo
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Suga Shinsuke
Department Of Reaction Chemistry Faculty Of Engineering The University Of Tokyo
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