半導体ガスセンサの過渡応答出力の解析

概要

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The objective of this study is qualitative and quantitative analysis of chemical species reacting to surface of semiconductor sensors. In ordinal studies on detection of gas species by semiconductor sensors, researchers attach importance to the chemical sensitivity of sensors and notice the output value of sensors in the stationary state of the response characteristics. However, the response in the transient state, i.e., the region between the beginning of reaction and the equilibrium of reaction, has much information of chemical processes of gases reacting to surface of sensor. Hence, in this study, we adopt an autoregressive (AR) model in which the parameters describing exponential curves are looked for. As a procedure, we construct a model of reaction on the surface of sensor and assume it as the first order reaction in gas molecule. We simulate the chemical processes mathematically, and apply the AR model on the signal. Then, we reproduce the reaction rate constants and the initial amplitudes and identify the species of gases.
社団法人電気学会の論文
2005-03-01