高感度SnO_2センサを用いた室内空気モニタリング(化学センサー・一般)

概要

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The present work is concerned on developing a high performance and reliable SnO_2-based Gas Sensor for Indoor Air Quality Monitoring. The SnO_2 doped with metallic additive was deposited on an alumina substrate using R.F. Induction Plasma Deposition (IPD) technique. The influence of the post-deposition annealing conditions on the physical properties of the generated sensing film was examined with SEM, XRD method. The obtained sensor showed high sensitivity to Volatile Organic Compounds such as Formaldehyde. The sensitivity to detect formaldehyde can be achieved at an extremely low gas concentration less than 20 parts-per-billion (ppb) with response time less than several minutes. Moreover, the effect of the metallic additive on the gas sensing properties was also investigated in the work.
社団法人電子情報通信学会の論文
2004-09-09