AlGaN/GaN Metal--Oxide--Semiconductor High-Electron-Mobility Transistors with a High Breakdown Voltage of 1400 V and a Complementary Metal--Oxide--Semiconductor Compatible Gold-Free Process

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概要

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• This paper reports the fabrication and characterization of AlGaN/GaN-on-sapphire metal--oxide--semiconductor high-electron-mobility transistors (MOS-HEMTs) using a complementary metal--oxide--semiconductor (CMOS) compatible gold-free process. Devices with a gate-to-drain spacing L_{\text{GD}} of 20 μm achieved an off-state breakdown voltage V_{\text{BR}} of 1400 V and an on-state resistance R_{\text{on}} of 22 m\Omega\cdotcm². This is the highest V_{\text{BR}} achieved so far for gold-free AlGaN/GaN MOS-HEMTs. In addition, high on/off current ratio I_{\text{on}}/I_{\text{off}} of {\sim}10^{9} and low gate leakage current I_{\text{G}} of {\sim}10^{-11} A/mm were also obtained.

• 2013-04-25

著者

• Chen Kevin

  Department Of Electrical And Electronic Engineering Hong Kong University Of Science And Technology

• Chan Kwok

  Department Of Biology The Hong Kong University Of Science And Technology

• Yeo Yee-chia

  Department Of Electrical And Computer Engineering National University Of Singapore

• CHI Dong

  Institute of Materials Research and Engineering

• Tan Leng

  Department Of Electrical And Computer Engineering National University Of Singapore

• Liu Wei

  Luminous! Centre Of Excellence For Semiconductor Lighting And Displays Nanyang Technological University

• Zhan Chunlei

  Department Of Electrical And Computer Engineering National University Of Singapore

• Liu Xinke

  Department Of Electrical And Computer Engineering National University Of Singapore

• OWEN Man

  Department of Electrical and Computer Engineering, National University of Singapore

• Owen Man

  Department of Electrical and Computer Engineering, National University of Singapore, Singapore 117576

• Chi Dong

  Institute of Materials Research and Engineering, Agency for Science Technology and Research, Singapore 117602

• Tan Leng

  Department of Electrical and Computer Engineering, National University of Singapore, Singapore 117576

• Chan Kwok

  Department of Electronic and Computer Engineering, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong

• Liu Wei

  Luminous! Centre of Excellence for Semiconductor Lighting and Displays, Nanyang Technological University, Singapore 639785

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