1207 ERバルブ一体形マイクロベロフラムアクチュエータの提案と応用(アクチュエータのためのマイクロナノプロセス,一般講演)

概要

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For micromachines using fluid power that perform power-needed tasks such as in-pipe working micromachines, we propose and develop a micro bellofram actuator (MB A) equipped with an ER valve. The MB A features larger ratio of the displacement to the free length than metal bellows and larger force than rubber bellows with higher allowable pressure. In this paper, an MBA equipped with an ER valve is proposed and fabricated with 10 mm diameter and 17 mm length. The static characteristics are clarified experimentally. Then, the actuator is applied to an inchworm type in-pipe mobile micromachine with an FI micropump, a flexible tank, and two toggle type supporting mechanisms. The extension/contraction motion is ascertained with a closed hydraulic circuit.
一般社団法人日本機械学会の論文
2010-04-18