J1103-1-2 交流電気浸透流を用いたマイクロアクチュエータの提案([1103-1]次世代アクチュエータシステム)

概要

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The paper presents a novel microactuator using AC electroosmosis. On surfaces of AC voltage applied plate elecrodes that contact with dielectric fluids, the gathered electric charges form electric double layers. Due to the AC electric field, the charged particles form convection flow, which is called AC electroosmosis. The proposed actuator transforms the covection flow to a unidirectional flow with channel walls and the unidirectional flow drives an fluid power actuator. The proposed actuator features simple and miniaturizable structure, low driving voltage, stable drive without electrolysis, and wide variety of the drivable fluids. In this paper, the microactuator is proposed and a basic pumping device is fabricated and tested. Based on the measured results, the no-load flow rate is estimated.
一般社団法人日本機械学会の論文
2010-09-04