1A1-C19 極薄平面ECFポンプの電極構造による高出力化

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This paper presents the effect of electrode geometry for high performance of an ultra thin-planar pump using the electro-conjugate fluid (ECF). The ECF is a kind of dielectric and functional fluids, which generates a powerful jet flow (ECF-jet) by an applied static electric field through a pair of electrodes. The ECF-jet directly acts on the working fluids, therefore, the ultra thin-planar ECF pump needs no moving parts and produces no vibration and noise. The proposed pump consists of three parts: a pump base, a top cover, and an electrode substrate. The overall dimensions of the ultra thin-planar ECF pump are 120 mm×38 mm×13 mm and the flow channel height is 500 μm. Various arrays of the electrodes, such as rectangular, saw-tooth, and arc-shape electrodes, were investigated for high performance of the proposed ultra thin-planar ECF pump. The pumping experiments of the fabricated pump were performed with five different electrode patterns using FF-1_<EHA2> as the working fluid. Through experimental results, the no-load flow rate of 940 mm^3/s, maximum output pressure of 11.6 kPa, and maximum output power of 3.1 mW were achieved at an applied voltage of 3.0 kV.
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