T0401-1-2 エレクトロマイグレーションにおける原子排出口の制御による種々の形状のAlマイクロ/ナノ材料の創製(金属ナノ材料の創製と展開(1))

概要

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A method for the fabrication of different shaped Al micro/nanomaterials (MNMs), like micro-belts, thin wires and micro-vertical-rods, based on discharging atoms through controlled holes in electromigration (EM) has been developed. The sample was a passivated polycrystalline Al line with a slit and some holes introduced by focused ion beam (FIB) at the anode end of it. Under same experimental conditions, different shaped Al MNMs were formed corresponding to different sized and shaped holes, from which Al atoms were discharged while current stressing. The mechanism of different shaped Al MNMs growth driven by EM was proposed in the discussion. It was found that the sizes of holes could affect the release of compressive stress coming from accumulation of Al atoms due to EM.
一般社団法人日本機械学会の論文
2009-09-12