3J3-4 高結合ZnO/水晶構造デバイスにおける温度特性改良(圧電デバイス)

概要

論文の詳細を見る
Recent years, several applications require radio frequency filters which have narrow bandwidth with high attenuation. ZnO film/quartz structure has a good potential to satisfy those requirements. This paper shows the optimization of ZnO/quartz structure to obtain nearly zero temperature coefficient of frequency (TCF)with maximizing electro-mechanical coupling coefficient (k^2). In the former papers which one of the authors reported about ZnO/quartz structure, nearly zero TCF with small electro-mechanical coupling coefficient, or maximized k^2 with non-zero TCF was reported. However, both zero TCF and maximized k^2 have not been simultaneously obtained. The authors estimate the optimized structure by calculation and confirm it by measurement also.
超音波エレクトロニクスの基礎と応用に関するシンポジウム運営委員会の論文
2009-11-18