3P3-10 高密度Cu溝電極からなる広帯域共振子とその応用(ポスターセッション)

概要

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A leaky surface acoustic wave on 0-15°YX-LiNbO_3 has a large electro-mecahnical coupling factor, but it has a leaky component. In order to change to Love wave without its leaky component, Au or Cu electrode with a low velocity has been used. It was reported that a resonator composed of a Cu-electrode/15°YX-LiNbO_3 had wide bandwidth of 12%. This time, authors attempted to fabricate an one-port resonator composed of a grooved Cu-electrode/4°YX-LiNbO_3. As the result, it had a wider bandwidth of 17% of 1.3 times and higher resonant and anti-resonant frequencies of 1.3 times than that on Cu electrode on 4°YX-LiNbO_3. This resonator was applied to a tunable filter, and the tunable filters having tunable range of 7% in center frequency was realized.
超音波エレクトロニクスの基礎と応用に関するシンポジウム運営委員会の論文
2009-11-18