3403 熱式浮上量調整スライダの浮上面電位測定(S70-1 情報機器コンピュータメカニクス(1),S70 情報機器コンピュータメカニクス)

概要

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To achieve an ultra-low flying height in magnetic head sliders for next-generation hard disk drives, we are developing an individual and in-situ technique to adjust flying height by using a built-in thermal actuator to compensate for flying-height deviations and variations. A reliability-related issue associated with the actuator is the electric discharge between the head and the disk. We evaluated the surface potential on the air bearing of the slider by using an atomic force microscope with a conductive tip developed for scanning probe lithography. If the heater is sufficiently isolated, less than 1% of the applied voltage can be measured on the air-bearing surface. However, the sample with an electrical shortage between the heater and another metal structure exhibited high potential on the air-bearing surface, which suggests that isolating the heater is important.
社団法人日本機械学会の論文
2007-09-07