カーボンナノチューブプローブを用いたpico-Newton力計測のための曲げ剛性の同定(機械力学,計測,自動制御)

概要

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Force measurement method by using a carbon nanotube (CNT) probe with pico-Newton (pN) order resolution is presented. A CNT probe is constructed by attaching it to the tip of a tungsten needle probe or an atomic force microscope (AFM) cantilever by using nanorobotic manipulators inside a field-emission scanning electron microscope (FE-SEM). Electron-beam-induced deposition (EBID) is used for fixation of CNT probes. For manipulating them easily and quickly, CNTs are dispersed in enthanol by ultrasonic waves and oriented on copper electrodes by electrophoresis. The elastic moduli of CNT probes are calibrated by exciting the probes at the fundamental frequency by applied electric field, for force measurements. We analyzed the resolution of force measurement method using a CNT probe. This method can be used to measure the mechanical properties of nanostructures and friction or exfoliation forces in nanometer order.
社団法人日本機械学会の論文
2004-02-25