エラストマー膜を介した電子パッケージの繰返しドライコンタクト超音波イメージング(J01-2 微細接続信頼性,J01 エレクトロニクス実装における熱制御および信頼性評価)

概要

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Dry-contact ultrasonic technique, which realizes the ultrasonic imaging without getting a sample wet, is a useful method for the inspection of electronic packages. In this study, we transmit high frequency ultrasound into the acrylic resin targets via four kinds of elastomer membranes with stability, and high durability, and select a membrane for cyclic ultrasonic imaging under a dry-contact condition. For recording high quality acoustic images, the membrane must satisfy the low ultrasonic attenuation and high acoustic coupling at the membrane/sample interface. Finally, we perform the cyclic ultrasonic imaging of an electronic package via the selected membrane, and repeatedly visualize the delamination in the package.
一般社団法人日本機械学会の論文
2004-09-04