Planarization of Film Deposition and Improvement of Channel Structure for Fabrication of Anti-Resonant Reflecting Optical Waveguide Type X-crossing Vertical Coupler Filter

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1998-06-30

著者

• Kato T

  Univ. Electro‐communications Chofu‐shi Jpn

• Kato T

  Precision And Intelligence Laboratory Tokyo Institute Of Technology

• Maeda T

  Advanced Industrial Sci. And Technol. Ibaraki Jpn

• Maeda T

  Central Research Laboratory Hitachi Ltd.

• Pan W

  Tohoku Univ. Sendai Jpn

• Pan Wugan

  3d Microphotonics Project Kanagawa Academy Of Science & Technology

• Maeda T

  Electron Devices Division Electrotechnical Laboratory

• Kokubun Y

  Dept. Of Electrical And Computer Engineering Faculty Of Engineering Yokohama National University

• Kokubun Y

  Yokohama National Univ. Yokohama‐shi Jpn

• Kato T

  Sumitomo Electric Ind. Ltd. Yokohama‐shi Jpn

• PAN Wugen

  Kanagawa Academy of Science and Technology

• CHU Sai

  Kanagawa Academy of Science and Technology

• SATO Shinya

  Kanagawa Academy of Science and Technology

• MAEDA Tsuyoshi

  Yokohama National University, Faculty of Engineering

• KATO Takashi

  Yokohama National University, Faculty of Engineering

• KOKUBUN Yasuo

  Kanagawa Academy of Science and Technology

• Chu S

  Little Optics Inc. Md Usa

• Kato Takatoshi

  Product Development Department Microwave Products Group Device Products Division Murata Mfg. Co. Ltd

• Chu S

  Little Optics Inc.

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