Fabrication technologies for vertically coupled microring resonator with multilevel crossing busline and ultracompact-ring radius
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概要
- 論文の詳細を見る
To eliminate the scattering loss at the crossing points of cross-grid busline waveguides, the multilevel crossing structure of the busline waveguides was introduced into a vertically coupled microring resonator (VCMRR) filter. To achieve this structure, two fabrication technologies were newly developed; One is a method to planarize perfectly the top surface of each buried waveguide, and the other is a method to fabricate microring waveguides with very smooth sidewalls. Using the latter method, an ultracompact VCMRR with a ring radius of 5 mum was realized and a free spectral range of 37 nm was successfully demonstrated. Next, using the former method, single-ring and quadruple series-coupled ring resonators with multilevel crossing busline waveguides were fabricated. A clear filter response was obtained for the single-microring resonator, and a boxlike filter response was obtained for the quadruple series-coupled microring resonator with multilevel crossing busline waveguides.
- Institute of Electrical and Electronics Engineersの論文
著者
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Kokubun Y
Dept. Of Electrical And Computer Engineering Faculty Of Engineering Yokohama National University
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Kokubun Y
Yokohama National Univ. Yokohama‐shi Jpn
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