Compositional Disordering of GaAs-Al_xGa_<1-x>As Superlattice by Ga Focused Ion Beam Implantation and its Application to Submicron Structure Fabrication
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1985-07-20
著者
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Tarucha S
Ntt Basic Res. Lab. Kanagawa Jpn
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Tarucha Seigo
Ntt Basic Research Laboratories Ntt Corporation
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Okamoto H
Department Of Systems Innovation Graduate School Of Engineering Science Osaka University
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Tarucha Seigo
Ntt Basic Research Laboratories:department Of Physics University Of Tokyo
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Tarucha Seigo
Ntt Electrical Communications Laboratories
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Hirasawa Yoshiro
NTT Musashino Electrical Communication Laboratories
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Suzuki Yoshifumi
NTT Musashino Electrical Communication Laboratories
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Tarucha Seigo
NTT Musashino Electrical Communication Laboratories
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Okamoto Hiroshi
NTT Musashino Electrical Communication Laboratories
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Suzuki Yoshifumi
Department Of Materials Science Faculty Of Engineering Kyushu Institute Of Technology
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Suzuki Yoshishige
Joint Research Center For Atom Technology(jrcat)-national Institute For Advanced Interdisciplinary R
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Okamaoto H
Laboratory Of Cardiovascular Pharmacology Department Of Biopharmaceutical Sciences Kobe Gakuin Unive
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Okamoto H
Department Of Systems And Control Engineering Anan National College Of Technology
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Tarucha S
Ntt Basic Research Laboratories Ntt Corporation
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岡本 宏巳
Department Of Pharmacology Faculty Of Pharmaceutical Sciences Kobe Gakuin University
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