All Niobium Nitride Josephson Junction with Hydrogenated Amorphous Silicon Barrier and its Application to the Logic Circuit
スポンサーリンク
概要
- 論文の詳細を見る
Josephson tunnel junctions with all niobium nitride (NbN) electrodes were fabricated with sputtered amorphous silicon (a-Si:H) films as tunnel barriers whose surfaces are oxidized by an rf-plasma oxidation. The specific capacitance of the fabricated junction strongly decreased with increase in the thickness of the a-Si:H film. The specific capacitance of less than 4 μF/cm^2 was obtained for the a-Si:H thickness of about 2 nm. A logic circuit composed of four-junction logic (4JL) gates was fabricated using these junctions and was operated with the minimum logic delay of 9 ps/gate.
- 社団法人応用物理学会の論文
- 1984-12-20
著者
-
Shoji A
National Inst. Advanced Industrial Sci. And Technol. Ibaraki Jpn
-
Takada S
Saitama University Faculty Of Engineering
-
Takada S
Saitama Univ. Urawa‐shi Jpn
-
Aoyagi Minoru
Electronics Engineering Group Nissan Motor Co. Ltd
-
Hayakawa H
Nagoya Univ. Nagoya Jpn
-
Nakagawa Hiroshi
Graduate School Of Materials Science Nara Institute Of Science And Technology
-
Kosaka S
Energy Technology Research Institute Aist Tsukuba Central
-
Nakagawa H
Univ. Tokyo Tokyo Jpn
-
SHINOKI Fujitoshi
Electrotechinical Laboratory
-
Shinoki F
Aomori Advanced Industrial Technol. Center Aomori Jpn
関連論文
- 統計熱力学の定式化--エントロピーを巡って (特集 シュレーディンガー--拡げた波紋の衝撃と足跡を追う)
- 23pEA-9 散逸量子系における一般化グリーン久保公式とゆらぎの関係式(23pEA 非平衡定常系II,領域11(統計力学,物性基礎論,応用数学,力学,流体物理))
- Preparation of Y-Ba-Cu-O Thin Films by the CVD Method in a Vacuum-Evaporation-Type Reactor
- 20pEJ-10 カウンターOVモデルの「乱流」化とその構造解析(20pEJ 粉体・交通流,領域11(統計力学,物性基礎論,応用数学,力学,流体物理))
- 23aEJ-4 ナノクラスター同士の斜め衝突における負の跳ね返り係数(23aEJ その他の系,領域11(統計力学,物性基礎論,応用数学,力学,流体物理))
- 21aEC-9 剪断粉体系における圧力と粘性係数の発散(21aEC 領域12,領域11合同(ガラスとその関連系II),領域12(ソフトマター物理,化学物理,生物物理))
- 20pEJ-2 蠕動運動による粉体の流れのシミュレーション(20pEJ 粉体・交通流,領域11(統計力学,物性基礎論,応用数学,力学,流体物理))
- 散逸系のゆらぎの定理と一般化Green-Kubo公式 (量子科学における双対性とスケール)
- 28pQL-9 摩擦粒子のジャミング転移(領域12,領域11合同(ガラス転移・ジャミング・レオロジー),領域12,ソフトマター物理,化学物理,生物物理)
- 26pQL-2 Generalized fluctuation relations without microscopic time reversality
- 26aQC-3 カウンターOVモデルのレーン形成とその不安定性(粉体・交通流,領域11,統計力学,物性基礎論,応用数学,力学,流体物理)
- Development of a Superconducting Analog-to-Digital Converter as a Readout for High-Resolution X-Ray Detectors Based on a Superconducting Tunnel Junction(Special Issue on Superconductive Electronics)
- Improved abrication Method for Nb/Al/AIO_x/Al/Nb Superconducting Tunnel Junctions as X-Ray Detectors
- Properties of Substrate Phonon Events in Superconducting Tunnel Junctions Induced by X-Ray Absorption
- 物性研究に将来はあるのか?
- 28pQL-3 場の理論によるガラス転移の研究 : 結合角秩序変数の役割(領域12,領域11合同(ガラス転移・ジャミング・レオロジー),領域12,ソフトマター物理,化学物理,生物物理)
- 24pTF-6 粉体の蠕動輸送における「ジャミング」転移と臨界指数(24pTF 粉体・交通流,領域11(統計力学,物性基礎論,応用数学,力学,流体物理))
- 24pTF-1 粉体レオロジーの履歴依存性と臨界スケーリング(24pTF 粉体・交通流,領域11(統計力学,物性基礎論,応用数学,力学,流体物理))
- Regulated Epitaxy of YBa_2Cu_3O_ by Atomic Control of Step Arrays on Vicinal SrTio_3(100) Substrates
- Control of Step Arrays on Normal and Vicinal SrTiO_3 (100) Substrates
- 24aTD-6 散逸粒子系における非平衡定常状態に対する応答理論(24aTD 非平衡定常系,領域11(統計力学,物性基礎論,応用数学,力学,流体物理))
- 25pQL-17 微小系衝突に見られる異常反発(非平衡定常系(熱・統計力学基礎論を含む),領域11,統計力学,物性基礎論,応用数学,力学,流体物理)
- Large-Area Tunnel Junction Exhibiting Two Operating Modes for X-ray Detection
- Response of Large Nb-Based Tunnel Junction to X-Rays
- Detection of Synchrotron Radiation by Nb-Based Superconducting Tunnel Junctions
- Fabrication of High Quality Superconducting Tunnel Junctions
- Effects of Film Thickness and Annealing Conditions on 2223 Phase Growth in BSCCO Films Produced by Pb Vapor Doping
- Growth of the 2223 Phase in Bi-Sr-Ca-Cu Oxide Films under a Controlled Pb Potential
- Dependence of Electrical Characteristics of NbN/TiN/NbN Josephson Junctions on Barrier Thickness and Temperature
- Uniformity of Overdamped NbCN/TiN/NbCN Josephson Junctions
- Durable and Low Power-Loss Semiconductor Devices for Specific Automotive Applications (Special Issue on ASICs for Automotive Electronics)
- Crystal Structure of New Metallic Compound Cu_6O_8・InCl
- The Synthesis and Formation Process of a New Cubic Conductive Cu_7O_(NO_3) Compound
- New Fabrication Process for Small Junctions Using a Selective Etch-Back Technique
- Stress in NbC_xN_ Films Prepared by Reactive Rf Magnetron Sputtering
- Magnetic Penetration Depths and Normal-State Resistivities of Epitaxial and Polycrystalline NbC_xN_ Films
- Properties of Large-Sized Nb-Based Superconducting Tunnel Junctions for X-Ray Detection
- Anisotropy in the Magnetic Penetration Depth of (103)YBa_2Cu_3O_ Thin Films
- Crystal Structure of New Compounds, Cu_6O_8Cu_2X (X=Cl, NO_3)
- Protein Dynamical Heterogeneity Derived from Neutron Incoherent Elastic Scattering (Cross-Disciplinary Physics and Related Areas of Science and Technology)
- Suppression of the Josephson Current in Normal-Distribution-Shaped Tunnel Junctions
- 剪断粒子系の時空相関(バイオ・マイクロ・スポーツの流れ 分子スケール(3),一般講演)
- A Study on the Potential Structure of the Barrier in Ba_K_xBiO_3/Natural-Barrier/Au Structures
- 24pTF-3 粉体せん断流の弱非線形解析(24pTF 粉体・交通流,領域11(統計力学,物性基礎論,応用数学,力学,流体物理))
- Fluxon Divider
- Fluxon Feedback Oscillator
- ボトルネックを通過する駆動粒子系について(バイオ・マイクロ・スポーツの流れ 分子スケール(2),一般講演)
- Injection-Detection Experiments to Study Diffusion Processes in Nb film using a Three Terminal in-plane Superconducting Double-Tunnel Junctions
- A New Fabrication Process of Superconducting Nb Tunnel Junctions with Ultralow Leakage Current for X-Ray Detection
- Simultaneous Switching on Vertically Stacked Josephson Junctions with Very Thin Intermediate Electrode
- Bismuth Valence Studies of As-Grown Superconducting Bi-Sr-Ca-Cu-O Thin Films with T_ from 98 K to 66 K
- High-T_c (95 K) As-Grown Superconducting Bi-Sr-Ca-Cu-O Thin Films
- Superconducting Properties of Y-Ba-Cu-O Thin Films Prepared by RF Magnetron Sputtering with a Grid Electrode
- Coverage Properties of Nb/Al films made by Electron Cyclotron Resonance
- Effect of the Critical Current Density and the Junction Size on the Leakage Current of Nb/Al-AlO_x/Nb Superconducting Tunnel Junctions for Radiation Detection
- Off-Chip Superconductor Wiring in Multichip Module for Josephson LSI Circuit (Special Section on Superconducting Devices)
- A New Drive Circuit Built in a Multichip Module for Supplying a Two-Phase Power to Josephson LSI Circuits
- Superconductor Wiring in Multichip Module for Josephson LSI Circuits
- Discourse Comprehension based on Activity Propagation
- Palladium Thin-Film Resistors for Josephson LSI Circuits
- NbN/MgO/NbN Josephson Junctions for Integrated Circuits
- Nb/Al-oxide/Nb and NbN/MgO/NbN Tunnel Junctions in Large Series Arrays for Voltage Standards
- Nb/Al-oxide/Nb Tunnel Junctions for Josephson Integrated Circuits
- Liquid-Nitrogen-Cooled Dry Etching of YBaCuO Thin Films
- S-N-S Josephson Junction Consisting of Y-Ba-Cu-O / Au / Nb Thin Films : Electrical Properties of Condensed Matter
- Deposition of Y-Ba-Cu-O Thin Films by RF Magnetron Sputtering with a Grid Electrode: Plasma Parameters
- Fiske Steps of Josephson Tunnel Junctions Formed with Normal-Distribution Functi
- Proposal of a Digital Double Relaxation Oscillation SQUID(Special Issue on Superconductive Electronics)
- Microwave Surface Resistance in 123 superconducting Thin Films
- Integrated DC-SQUID Magnetometer
- All Niobium Nitride Josephson Junction with Hydrogenated Amorphous Silicon Barrier and its Application to the Logic Circuit
- A New Josephson Timed Inverter with Four-Junction Logic (4JL) Gate
- NAND Gate for SFQ Logic Circuits(Special Issue on Superconductive Devices and Systems)
- Sub-10 ps Logic Operations in Josephson Four-Junction Logic (4JL) Gates
- A Josephson Full Adder Circuit Using Four-Junction Logic (4JL) Gates : C-2: III-V CRYSTALS/JOSEPHSON JUNCTION
- Operating Characteristics of Josephson Four-Junction Logic (4JL) Gate
- Experimental Analysis of YBa_2Cu_3O_x/Ag Proximity Interfaces
- Unique Method of Patterning Superconducting Thin Films by Selective Growth of Y-Ba-Cu-O
- Josephson Tunnel Junctions with Nb, NbN Double-Layered Electrodes
- Tunneling Characteristics of NbN/NbN Josephson Junctions with Glow-Discharge-Produced Amorphous Silicon Barriers
- Current Injection Logic Gate with Four Josephson Junctions : C-2: JOSEPHSON DEVICES
- Fabrication of High Quality NbN/Pb Josephson Junction : C-2: JOSEPHSON DEVICES
- 1408 ナノクラスター同士の衝突における非平衡統計力学(OS14.衝撃・崩壊問題(2),オーガナイズドセッション)
- Y-Ba-Cu-O Superconducting Thin Films Prepared by Flash Evaporation : Electrical Properties of Condensed Matter
- A Direct Coupled Josephson Sampler