Characterization of Silicon Native Oxide Formed in SC-1, H_2O_2 and Wet Ozone Processes
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1997-09-15
著者
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Takeda M
Government Institute For Industrial Research
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Takai Yoshiaki
Nagoya University
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Takeda M
Kobe Univ. Mercantile Marine Kobe Jpn
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Ohwaki T
Toyota Central R & D Laboratories Inc.
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Ohwaki Takeshi
Technical Development Group Kobe Steel Ltd.
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TAKEDA Mikako
Technical Development Group, Kobe Steel Ltd.
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TAKAI Yoshizo
Faculty of Engineering, Osaka University
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