TAKEDA Mikako | Technical Development Group, Kobe Steel Ltd.
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概要
関連著者
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Ohwaki Takeshi
Technical Development Group Kobe Steel Ltd.
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TAKEDA Mikako
Technical Development Group, Kobe Steel Ltd.
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TAKAI Yoshizo
Faculty of Engineering, Osaka University
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Takeda M
Government Institute For Industrial Research
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Takai Yoshiaki
Nagoya University
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Takeda M
Kobe Univ. Mercantile Marine Kobe Jpn
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Ohwaki T
Toyota Central R & D Laboratories Inc.
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Fujii H
Technical Development Group Kobe Steel Ltd.
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SHIMIZU Ryuichi
Faculty of Engineering, Osaka University
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Fujii Hideo
Technical Development Group Kobe Steel Ltd.
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KUSUMOTO Eisuke
Technical Development Group, Kobe Steel Ltd.
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KAIHARA Yoshiyuki
Faculty of Engineering, Osaka University
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Kaihara Yoshiyuki
Faculty Of Engineering Osaka University
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Kusumoto Eisuke
Technical Development Group Kobe Steel Ltd.
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Shimizu Ryuichi
Faculty Of Engineering Osaka University
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Takai Yoshizo
Faculty of Engineering, Osaka University, Suita, Osaka 565, Japan
著作論文
- Influence of Native Oxides on the Reliability of Ultrathin Gate Oxide
- Characterization of Silicon Native Oxide Formed in SC-1, H_2O_2 and Wet Ozone Processes
- Characterization of Silicon Native Oxide Formed in SC-1, H2O2 and Wet Ozone Processes