HDTVカメラ用1"150万画素IT-CCD撮像素子 : 情報入力,コンシューマエレクトロニクス

概要

論文の詳細を見る
A 1" format 1.5M pixel Interline Transfer (IT) CCD image sensor has been developed for an HDTV camera system. To achieve a low smear ratio while maintaining a high level of sensitivity, we have developed a new impurity profile of buried P^+-layer and an onchip micro lens array with a deep-UV resist. Then we have achieved the sensivity of 80 nA/lx, the maximum charge handling capacity of 1.2×10^5 electrons, and the smear ratio of less than -110 dB. We have obtained a high fidelity picture with a horizontal resolution of 820TV lines.
社団法人映像情報メディア学会の論文
1992-02-28