K-0641 "ひさし"で測る基板上の薄膜の機械的性質 : 新規試験片形状による強度・弾性特性の系統的評価(S06-3 膜特性の新評価手法)(S06 コーティング材の力学特性と損傷機構)

概要

論文の詳細を見る
Mechanical behavior of a thin film deposited on a substrate would be affected by basically four parameters, that are strength of the film, strength of the interface, Young's modulus of the film and residual stress in the film, provided that properties of the substrate are given. Therefore independent measurement of these four parameters should be the key to evaluate the mechanical properties of thin films on substrates as the materials systems made of films and substrates and interfaces. A new systematic method of measurement for these parameters is presented, where just a simple configuration of specimen with "film projection" in various length is used. An application example is demonstrated for the case of a diamond film on a WC-Co substrate.
一般社団法人日本機械学会の論文
2001-08-22